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The off-axis stage unit in the lab at the AIP, Mar. 20, 2003.
The flexure is being measured with our 3D measurement machine. The maschine
reproduces position to about 1 micron accuracy. Changing the load and
the direction of the load on the upper stage and measuring the position of
three points on the stage as well as two reference points close to
the table surface, we can measure the flexure in 3D of the unit.
The off-axis unit has been design in-house and
it has been manufactured by
Feinmess Dresden.
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The off-axis stage unit in the lab at the AIP, Mar.20, 2003.
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The off-axis stage unit in the lab at the AIP, Mar.20, 2003.
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The off-axis stage unit in the lab at the AIP, Mar.20, 2003.
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The off-axis stage unit in the lab at the AIP, Mar.20, 2003.
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